


Mitutoyo 559-525-37 | NC-Linear Scale AT1347-150-H_1nm | Mitsubishi Interface Full Duplex | Resolution 1 ¼m
The Mitutoyo 559-525-37 (AT1347-150-H_1nm) is an ultra-high-precision NC-linear scale developed for CNC and metrology systems that require nanometer-level accuracy and high-speed data feedback. Offering a superior 1 nm (0.001 μm) resolution, it is ideal for advanced positioning tasks in ultra-fine machining and inspection applications. The scale features a Mitsubishi full-duplex interface, enabling fast, real-time two-way communication with Mitsubishi CNC systems. Its rugged and sealed construction ensures reliable performance in harsh environments, making it suitable for use in precision tooling, semiconductor processing, and high-end coordinate measuring machines.

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- Specifications
- Features
- Downloads
Current consumption [mA] | 270 mA (maximum value) |
Interface | Mitsubishi Interface Full Duplex |
Length | Signal Cable: Maximum 29 m (signal cable + feedback cable) |
Max. Response Speed | 180 m/min |
Power Supply | 5 VDC +/- 10% |
Resolution | 1 1/4m |
Series | ABS AT1300-H Series |
Type | H-Type |
- 1 nm (0.001 μm) resolution: Provides ultra-precise measurement for nanometer-scale motion control.
- High accuracy and repeatability are suited for advanced machining and inspection systems.
- Mitsubishi full-duplex interface: Supports real-time bi-directional communication with Mitsubishi controllers.
- Fully compatible with Mitsubishi Electric CNC systems and servo drive units.
- Engineered with a rigid body to withstand vibration, thermal expansion, and mechanical stress.
- Sealed construction protects from oil, coolant, dust, and fine contaminants.
- Ideal for CNC machines, CMMs, and nano-precision manufacturing systems.
- Supports integration into automated feedback control and motion systems.
- Widely used in aerospace, semiconductor, and microfabrication industries.
- A top-tier choice for applications demanding stable, high-speed nanometer-level feedback.
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