


Mitutoyo 559-502-47 | NC Linear Scale AT1347A-200-S | S-Type | Mitsubishi MELSERVO Interface | Resolution 0.001 ¼m
The Mitutoyo 559-502-47 NC Linear Scale (AT1347A-200-S) delivers ultra-high precision with an exceptional 0.001 μm (1 nm) resolution, tailored for the most demanding positioning tasks. With a 200 mm measuring range, it supports medium-travel applications that require nanometer-level feedback. Its robust S-Type design ensures mechanical and thermal stability, even in intensive machining environments. Compatible with Mitsubishi MELSERVO interfaces, it ensures real-time, high-speed CNC data transmission. Ideal for semiconductor equipment, optical systems, and ultra-precision machinery.

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- Specifications
- Features
- Downloads
Current consumption [mA] | 270 mA (maximum value) |
Interface | Mitsubishi MELSERVO |
Length | Signal Cable: Maximum 29 m (signal cable + feedback cable) |
Power Supply | 5 VDC +/- 10% |
Resolution | 0.001 1/4m |
Series | ABS AT1300-S Series |
Type | S-Type |
- Resolution: 0.001 μm (1 nm) – for extreme precision requirements
- Measuring Range: 200 mm, optimal for high-accuracy medium-travel axes
- Interface: Mitsubishi MELSERVO – seamless CNC system integration
- S-Type Structure: Engineered for durability and environmental resistance
- Applications: Semiconductor tooling, optics, metrology, nanotechnology, and ultra-precision machining
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