


Mitutoyo 559-500-47 | NC Linear Scale AT1347A-100-S | S-Type | Mitsubishi MELSERVO Interface | Resolution 0.001 ¼m
The Mitutoyo 559-500-47 NC Linear Scale (AT1347A-100-S) sets the benchmark for nanometer-level precision with an exceptional 0.001 μm (1 nm) resolution. Designed with a rugged S-Type structure, it provides top-tier stability and vibration resistance in precision machining environments. The Mitsubishi MELSERVO interface ensures fast, accurate data transmission for ultra-high-performance CNC systems. Perfect for applications where ultra-fine motion control and flawless repeatability are critical. Ideal for semiconductor, optical, metrology, and advanced manufacturing industries.

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- Specifications
- Features
- Downloads
Current consumption [mA] | 270 mA (maximum value) |
Interface | Mitsubishi MELSERVO |
Length | Signal Cable: Maximum 29 m (signal cable + feedback cable) |
Power Supply | 5 VDC +/- 10% |
Resolution | 0.001 1/4m |
Series | ABS AT1300-S Series |
Type | S-Type |
- Resolution: Ultra-high 0.001 μm (1 nm) for nanometer-level feedback
- Interface: Mitsubishi MELSERVO for high-speed CNC integration
- Robust S-Type Body: Ensures long-term accuracy in demanding conditions
- Measuring Range: 100 mm – compact yet built for precision applications
- Best Suited For: Ultra-precision machining, semiconductor tools, and inspection systems
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