Skip to product information
Availability:
in stock
Alicat Scientific MCV | Vacuum Mass Flow Controller with Shutoff Valve | 0.5 SCCM-20 SLPM, 1e-9 atm-cc/s He
Part Number : MCV
The Alicat Scientific MCV is a vacuum-service mass flow controller with an integrated pneumatic shutoff valve, covering 0.5 SCCM to 20 SLPM full scale. Accuracy is ±0.5% of reading or ±0.1% of full scale, repeatability ±(0.1% of reading + 0.02% FS), and valve leak integrity 1 x 10^-9 atm-cc/s helium. It is preconfigured for CVD, ALD, PVD and coating processes. Alicat lists MCV process connections as VCR (default), compression, VCO.
Key features
- Integrated pneumatic shutoff valve
- 10,000:1 control range
- 98 selectable gas calibrations
- Response as low as 30 ms
- VCR process connections by default
For pricing, please contact our experts.
