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Alicat Scientific MCVS | Corrosion-Resistant Vacuum Mass Flow Controller | 0.5 SCCM-20 SLPM, pneumatic shutoff
Part Number : MCVS
The MCVS combines corrosion-resistant construction with a pneumatic shutoff valve rated to 1 x 10^-9 atm-cc/s helium, for vacuum processes using reactive gases. It covers 0.5 SCCM to 20 SLPM full scale with accuracy of ±0.4% of reading and ±0.2% of full scale. Steady-state control range is 1 to 100% of full scale. For integration, the MCVS offers process connections of VCR (default), compression, VCO. Alicat lists MCVS communications as RS-232 (default), RS-485, analog, Modbus RTU/TCP, EtherNet/IP, EtherCAT, PROFINET, PROFIBUS, DeviceNet, IO-Link.
Key features
- Pneumatic shutoff valve
- Corrosion-resistant materials
- 128+ selectable gas calibrations
- Repeatability ±0.2% FS
- VCR, compression or VCO connections
- Process connections: VCR (default), compression, VCO
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