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Alicat Scientific MCES | Corrosion-Resistant SEMI Footprint Mass Flow Controller
Part Number : MCES
The MCES is Alicat's corrosion-resistant SEMI-footprint mass flow controller, covering 0.5 SCCM to 20 SLPM with more than 128 preloaded gas calibrations. Accuracy is ±(0.4% of reading + 0.2% of full scale) with ±0.2% FS repeatability and a 10,000:1 control range. It operates from -10 to +60 °C in semiconductor and etch gas panels. Available MCES process connections: VCR (default), compression, VCO. For integration, the MCES offers communications of RS-232 (default), RS-485, analog, Modbus RTU/TCP, EtherNet/IP, EtherCAT, PROFINET, PROFIBUS, DeviceNet, IO-Link.
Key features
- Corrosion-resistant wetted path
- SEMI footprint
- 128+ selectable gas calibrations
- 10,000:1 control range
- Range codes from MCES-0.5SCCM to MCES-20SLPM
- Process connections: VCR (default), compression, VCO
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