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Alicat Scientific MCS | Corrosion-Resistant Mass Flow Controller | 0.5 SCCM-12,000 SLPM, up to 130 gases
Part Number : MCS
The MCS is the corrosion-resistant member of the Alicat Scientific MC family, built for corrosive as well as non-corrosive gases from 0.5 SCCM to 12,000 SLPM full scale. It holds up to 130 gas calibrations and is specified at ±0.4% of reading and ±0.2% of full scale. Typical duties include semiconductor, chemical and research processes handling reactive gases.
Key features
- Up to 130 corrosive and non-corrosive gas calibrations
- Control range 1-100% of full scale
- Control response as fast as 30 ms
- Laminar DP measurement with pressure and temperature correction
- Shares MC build options for displays, connections and protocols
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